Patent Assignment
Reel/Frame 030735/0170
Assignment of Assignor's Interest
Recorded: 2013-07-03
Pages: 4
Assignors
CHANDRASEKHARAN, RAMESH
Executed: 2013-06-28
LEESER, KARL
Executed: 2013-07-01
XIA, CHUNGUANG
Executed: 2013-07-02
TUCKER, JEREMY
Executed: 2013-07-02
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Chemical Deposition Apparatus Having Conductance Control