Patent Assignment
Reel/Frame 030735/0339
Assignment of Assignor's Interest
Recorded: 2013-07-03
Pages: 6
Assignors
CHANDRASEKHARAN, RAMESH
Executed: 2013-06-28
TUCKER, JEREMY
Executed: 2013-07-02
LEESER, KARL
Executed: 2013-07-01
SCHOEPP, ALAN
Executed: 2013-07-01
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Deposition Apparatus Including an Isothermal Processing Zone