Patent Assignment
Reel/Frame 030756/0154
Assignment of Assignor's Interest
Recorded: 2013-07-09
Pages: 4
Assignors
OGATA, NOBUHIRO
Executed: 2013-06-18
KIYOSE, HIROMI
Executed: 2013-07-01
YANO, HIDETSUGU
Executed: 2013-06-18
HIRAYAMA, TSUKASA
Executed: 2013-06-18
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus with Cleaning Jig