Patent Assignment
Reel/Frame 030773/0547
Assignment of Assignor's Interest
Recorded: 2013-07-11
Pages: 3
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Illumination Optics for a Metrology System for Examining an Object Using Euv Illumination Light and Metrology System Comprising an Illumination Optics of This Type