Patent Assignment
Reel/Frame 030776/0907
Assignment of Assignor's Interest
Recorded: 2013-07-11
Pages: 3
Assignee
NOVELLUS SYSTEMS, INC.
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Electroplating and Post-Electrofill Systems with Integrated Process Edge Imaging and Metrology Systems