Patent Assignment
Reel/Frame 030779/0187
Assignment of Assignor's Interest
Recorded: 2013-07-11
Pages: 4
Assignors
YANG, SHIN-YI
Executed: 2013-06-07
LEE, HSIANG-HUAN
Executed: 2013-06-07
LEE, MING HAN
Executed: 2013-06-07
YEH, CHING-FU
Executed: 2013-06-07
LIOU, PEI-YIN
Executed: 2013-06-25
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77 R.O.C., TAIWAN
Covered Property
(1)
Method and Apparatus for Back End of Line Semiconductor Device Processing