Patent Assignment
Reel/Frame 030780/0222
Assignment of Assignor's Interest
Recorded: 2013-07-11
Pages: 4
Assignor
KOH, CHA-WON
Executed: 2013-07-05
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUNWON-SI, GYEONGGI-DO, 443-742, KOREA, REPUBLIC OF
Covered Property
(1)
Method of Forming Fine Patterns of Semiconductor Device