Patent Assignment
Reel/Frame 030782/0266
Assignment of Assignor's Interest
Recorded: 2013-07-11
Pages: 3
Assignor
GUHA, JOYDEEP
Executed: 2013-07-10
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Dual Chamber Plasma Etcher with Ion Accelerator