Patent Assignment
Reel/Frame 030796/0193
Assignment of Assignor's Interest
Recorded: 2013-07-15
Pages: 4
Assignors
OGATA, NOBUHIRO
Executed: 2013-07-04
WAKIYAMA, TERUFUMI
Executed: 2013-07-04
KAI, YOSHIHIRO
Executed: 2013-07-04
KAMO, RYOUGA
Executed: 2013-07-04
IKEDA, YOSHINORI
Executed: 2013-07-04
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus and Cleaning Method