Patent Assignment
Reel/Frame 030798/0330
Assignment of Assignor's Interest
Recorded: 2013-07-15
Pages: 2
Assignors
HUANG, CHIEN-HUA
Executed: 2013-07-04
HUANG, TSUNG-MIN
Executed: 2013-07-04
LEE, CHUNG-JU
Executed: 2013-07-04
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Wet Cleaning Method for Cleaning Small Pitch Features