Patent Assignment
Reel/Frame 030805/0344
Assignment of Assignor's Interest
Recorded: 2013-07-16
Pages: 4
Assignors
NAKAMURA, NAOTO
Executed: 2013-07-04
NAGANO, TOSHIHIKO
Executed: 2013-07-04
ASAI, RYUJI
Executed: 2013-07-10
KOZAWA, SEIJI
Executed: 2013-07-04
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Abnormality Determination System and Abnormality Determination Method for Processing Apparatus