Assignment of Assignor's Interest

Recorded: 2013-07-17 Pages: 4

Assignors

KATO, HITOSHI

Executed: 2013-07-12

MIURA, SHIGEHIRO

Executed: 2013-07-12

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN

Covered Property (1)

Film Deposition Apparatus and Film Deposition Method

Patent: 9,466,483 →

Application: 13/943,919 →

Publication: US 2014/0024200