Patent Assignment
Reel/Frame 030864/0464
Assignment of Assignor's Interest
Recorded: 2013-07-24
Pages: 6
Assignors
HSIEH, CHIH-CHANG
Executed: 2013-04-12
LIN, YUNG-KAI
Executed: 2013-04-12
LIU, HSU-SHUI
Executed: 2013-04-12
LO, KAI
Executed: 2013-04-16
CHEN, CHIH-PING
Executed: 2013-04-16
CHAN, CHIAN-KUN
Executed: 2013-04-16
HSU, CHUNG-CHIEH
Executed: 2013-04-16
CHANG, CHIH-KUO
Executed: 2013-04-12
HSIAO, WEI-TING
Executed: 2013-04-12
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN ROAD 6, HSINCHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Semiconductor Apparatus with Transportable Edge Ring for Substrate Transport