Patent Assignment
Reel/Frame 030887/0706
Assignment of Assignor's Interest
Recorded: 2013-07-26
Pages: 12
Assignors
MINSHALL, EDMUND B.
Executed: 2013-05-23
MORRIS, VICTOR F.
Executed: 2013-05-23
CHARAN, RAM
Executed: 2013-05-21
POWELL, RONALD A.
Executed: 2013-05-21
KHOSLA, MUKUL
Executed: 2013-05-20
Assignee
NOVELLUS SYSTEMS, INC.
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method and Apparatus for Rapid Pump-Down of a High-Vacuum Loadlock