Patent Assignment
Reel/Frame 030890/0393
Assignment of Assignor's Interest
Recorded: 2013-07-28
Pages: 10
Assignors
DENPOH, KAZUKI
Executed: 2013-07-16
VENTZEK, PETER L G
Executed: 2013-07-11
CHEN, LEE
Executed: 2013-07-17
XU, LIN
Executed: 2013-07-16
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Hollow Cathode Device and Method for Using the Device to Control the Uniformity of a Plasma Process