Patent Assignment
Reel/Frame 030892/0357
Assignment of Assignor's Interest
Recorded: 2013-07-29
Pages: 2
Assignors
IWAO, FUMIKO
Executed: 2013-07-19
SHIMURA, SATORU
Executed: 2013-07-19
YOSHIHARA, KOUSUKE
Executed: 2013-07-19
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA, 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Coating Treatment Method and Coating Treatment Apparatus