Patent Assignment
Reel/Frame 030893/0163
Assignment of Assignor's Interest
Recorded: 2013-07-29
Pages: 2
Assignors
AKAE, NAONORI
Executed: 2009-11-04
HIROSE, YOSHIRO
Executed: 2009-11-04
TAKASAWA, YUSHIN
Executed: 2009-11-05
OTA, YOSUKE
Executed: 2009-11-04
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Substrate Processing Apparataus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.