Patent Assignment
Reel/Frame 030896/0611
Assignment of Assignor's Interest
Recorded: 2013-07-29
Pages: 7
Assignors
SMARGIASSI, EUGENE
Executed: 2013-07-26
LAU, STEPHEN YU-HONG
Executed: 2013-07-26
KAMIAN, GEORGE D.
Executed: 2013-07-26
XI, MING
Executed: 2013-07-26
Assignee
NOVELLUS SYSTEMS, INC.
4000 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Purging of Porogen from Uv Cure Chamber