Patent Assignment
Reel/Frame 030898/0329
Assignment of Assignor's Interest
Recorded: 2013-07-29
Pages: 10
Assignors
LUBOMIRSKY, DMITRY
Executed: 2012-11-09
NEMANI, SRINIVAS
Executed: 2012-10-22
YIEH, ELLIE
Executed: 2012-10-12
BELOSTOTSKIY, SERGEY G.
Executed: 2012-10-22
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Process Chamber for Etching Low K and Other Dielectric Films