Assignment of Assignor's Interest

Recorded: 2013-07-30 Pages: 2

Assignor

SHIBAYAMA, NOBUYUKI

Executed: 2013-07-18

Assignee

DAINIPPON SCREEN MFG. CO., LTD.

TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO 602-8585, JAPAN

Covered Property (1)

Substrate Processing Device and Substrate Processing Method for Carrying Out Chemical Treatment for Substrate

Application: 13/953,964 →

Publication: US 2014/0051259

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.