Patent Assignment
Reel/Frame 030937/0866
Assignment of Assignor's Interest
Recorded: 2013-08-02
Pages: 6
Assignors
SIRARD, STEPHEN M.
Executed: 2013-06-18
HYMES, DIANE
Executed: 2013-06-19
POSTEL, OLIVIER B.
Executed: 2013-06-16
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method of Collapse-Free Drying of High Aspect Ratio Structures