Patent Assignment
Reel/Frame 030955/0036
Assignment of Assignor's Interest
Recorded: 2013-08-07
Pages: 2
Assignors
MUTO, SATORU
Executed: 2013-06-17
ONO, TETSUO
Executed: 2013-06-17
OHGOSHI, YASUO
Executed: 2013-06-17
EITOKU, HIROFUMI
Executed: 2013-06-17
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method and Apparatus for Plasma Processing
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.