Patent Assignment
Reel/Frame 030961/0292
Assignment of Assignor's Interest
Recorded: 2013-08-07
Pages: 2
Assignor
LAVOIE, ADRIEN
Executed: 2013-01-10
Assignee
NOVELLUS SYSTEMS, INC.
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Apparatuses and Methods for Depositing Sic/Sicn Films via Cross-Metathesis Reactions with Organometallic Co-Reactants