Patent Assignment
Reel/Frame 030961/0733
Assignment of Assignor's Interest
Recorded: 2013-08-07
Pages: 3
Assignor
KELLOGG, MICHAEL C.
Executed: 2013-08-06
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Silicon Containing Confinement Ring for Plasma Processing Apparatus and Method of Forming Thereof