Patent Assignment
Reel/Frame 031006/0554
Assignment of Assignor's Interest
Recorded: 2013-08-14
Pages: 8
Assignor
TAMAR TECHNOLOGY
Executed: 2013-04-26
Assignee
RUDOLPH TECHNOLOGIES, INC.
ONE FLANDERS ROAD, FLANDERS, NEW JERSEY, 07836
Covered Properties
(5)
Concentricity Measuring Instrument for a Fiberoptic Cable End
Patent:
6,710,864 →
Application:
10/382,669 →
Trench Measurement System Employing a Chromatic Confocal Height Sensor and a Microscope
Wafer Measurement System and Apparatus
Patent:
7,738,113 →
Application:
11/978,881 →
System for directly measuring the depth of a high aspect ratio etched feature on a wafer
Application:
12/456,781 →
Publication:
US 2010/0321671
System for Directly Measuring the Depth of a High Aspect Ratio Etched Feature on a Wafer
Related Assignments
(4)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 23, 2005
From: MARX, DAVID S.; GRANT, DAVID L.
To: TAMAR TECHNOLOGY, INC.
Reel/Frame 017142/0840 →
Assignment of Assignor's Interest
Apr 22, 2010
From: MARX, DAVID S.; GRANT, DAVID L.; MAHONEY, MICHAEL A.; CHAN, TSAN YUEN
To: TAMAR TECHNOLOGY, INC.
Reel/Frame 024370/0650 →
Assignment of Assignor's Interest
Aug 13, 2013
From: MARX, DAVID; GRANT, DAVID
To: RUDOLPH TECHNOLOGIES, INC.
Reel/Frame 031001/0193 →
Assignment of Assignor's Interest
Jul 2, 2020
From: RUDOLPH TECHNOLOGIES, INC.
To: ONTO INNOVATION INC.
Reel/Frame 053117/0623 →