Patent Assignment
Reel/Frame 031007/0679
Assignment of Assignor's Interest
Recorded: 2013-08-14
Pages: 7
Assignors
VAINER, YURI
Executed: 2010-12-22
BANINE, VADIM YEVGENYEVICH
Executed: 2010-12-23
DEN BOEF, ARIE JEFFREY
Executed: 2010-12-21
SCACCABAROZZI, LUIGI
Executed: 2010-12-22
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Methods and Apparatus for Inspection of Articles, Euv Lithography Reticles, Lithography Apparatus and Method of Manufacturing Devices