Patent Assignment
Reel/Frame 031018/0138
Assignment of Assignor's Interest
Recorded: 2013-08-15
Pages: 3
Assignors
AIURA, KAZUHIRO
Executed: 2013-07-22
ITO, NORIHIRO
Executed: 2013-07-22
NAGAI, TAKASHI
Executed: 2013-07-22
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Liquid Treatment Apparatus and Liquid Treatment Method