Patent Assignment
Reel/Frame 031027/0617
Assignment of Assignor's Interest
Recorded: 2013-08-16
Pages: 6
Assignees
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, 107-6325, JAPAN
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Numerical Aperture Integration for Optical Critical Dimension (Ocd) Metrology
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.