Patent Assignment
Reel/Frame 031064/0287
Assignment of Assignor's Interest
Recorded: 2013-08-22
Pages: 4
Assignee
INFINEON TECHNOLOGIES AG
AM CAMPEON 1-12, NEUBIBERG, 85579, GERMANY
Covered Property
(1)
Mems Microphone with Low Pressure Region Between Diaphragm and Counter Electrode