Patent Assignment
Reel/Frame 031071/0300
Assignment of Assignor's Interest
Recorded: 2013-08-23
Pages: 8
Assignors
GYTRI, LISA MARIE
Executed: 2013-08-21
LAU, STEPHEN YU-HONG
Executed: 2013-08-23
LEE, JAMES FOREST
Executed: 2013-08-21
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Exhaust Flow Spreading Baffle-Riser to Optimize Remote Plasma Window Clean