Patent Assignment
Reel/Frame 031092/0805
Assignment of Assignor's Interest
Recorded: 2013-08-27
Pages: 4
Assignors
LU, CHIH WEI
Executed: 2013-05-16
LEE, CHUNG-JU
Executed: 2013-05-16
BAO, TIEN-I
Executed: 2013-05-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Structure and Method for a Low-K Dielectric with Pillar-Type Air-Gaps