Patent Assignment
Reel/Frame 031104/0936
Assignment of Assignor's Interest
Recorded: 2013-08-28
Pages: 4
Assignees
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Optimized spatial modeling for optical CD metrology
Application:
61/830,536 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.