Patent Assignment
Reel/Frame 031105/0032
Assignment of Assignor's Interest
Recorded: 2013-08-28
Pages: 4
Assignors
BACKUES, MARK
Executed: 2013-08-28
AOYAGI, PAUL
Executed: 2013-08-28
POSLAVSKY, LEONID
Executed: 2013-08-28
Assignees
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Fast Automatic Determination of Fourier Harmonic Order for RCWA
Application:
61/831,085 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.