Patent Assignment
Reel/Frame 031107/0475
Assignment of Assignor's Interest
Recorded: 2013-08-29
Pages: 5
Assignors
HATAKEYAMA, JUN
Executed: 2013-08-20
KATAYAMA, KAZUHIRO
Executed: 2013-08-20
FUNATSU, KENJI
Executed: 2013-08-20
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process