Patent Assignment
Reel/Frame 031107/0979
Assignment of Assignor's Interest
Recorded: 2013-08-29
Pages: 2
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77 R.O.C., TAIWAN
Covered Property
(1)
Patterning Approach to Reduce via to via Minimum Spacing