Patent Assignment
Reel/Frame 031109/0459
Change of Name
Recorded: 2013-08-29
Pages: 8
Assignor
VISTEC SEMICONDUCTOR SYSTEMS GMBH
Executed: 2009-03-10
Assignee
KLA-TENCOR MIE GMBH
KUBACHER WEG 4, WEILBURG, 35781, GERMANY
Covered Property
(1)
Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.