Patent Assignment
Reel/Frame 031120/0699
Assignment of Assignor's Interest
Recorded: 2013-08-30
Pages: 3
Assignors
LIU, PING-YIN
Executed: 2013-08-16
HUANG, XIN-HUA
Executed: 2013-08-16
TSENG, LEE-CHUAN
Executed: 2013-08-19
CHAO, LAN-LIN
Executed: 2013-08-19
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77 R.O.C., TAIWAN
Covered Property
(1)
Low Contamination Chamber for Surface Activation