Patent Assignment
Reel/Frame 031138/0387
Assignment of Assignor's Interest
Recorded: 2013-09-04
Pages: 3
Assignee
TECHEST CO., LTD.
51-12, JIMUN-RO, WONGOK-MYEON, ANSEONG-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Wide Range Temperature Control System for Semiconductor Manufacturing Equipment Using Thermoelectric Element