Patent Assignment
Reel/Frame 031139/0093
Assignment of Assignor's Interest
Recorded: 2013-08-07
Pages: 2
Assignors
WATANABE, YOJI
Executed: 2013-06-28
OWA, SOICHI
Executed: 2013-07-01
FUJIWARA, TOMOHARU
Executed: 2013-07-01
Assignee
NIKON CORPORATION
12-1, YURAKUCHO 1-CHOME, CHIYODA-KU, TOKYO 100-8331, JAPAN
Covered Property
(1)
Spatial Light Modulator, Method of Driving Same, and Exposure Method and Apparatus