Patent Assignment
Reel/Frame 031145/0830
Assignment of Assignor's Interest
Recorded: 2013-09-05
Pages: 5
Assignors
SINGH, HARMEET
Executed: 2013-06-03
LILL, THORSTEN
Executed: 2013-06-03
VAHEDI, VAHID
Executed: 2013-06-03
PATERSON, ALEX
Executed: 2013-06-03
TITUS, MONICA
Executed: 2013-06-03
KAMARTHY, GOWRI
Executed: 2013-06-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Internal Plasma Grid for Semiconductor Fabrication