Patent Assignment
Reel/Frame 031154/0904
Assignment of Assignor's Interest
Recorded: 2013-09-06
Pages: 4
Assignors
LUBOMIRSKY, DMITRY
Executed: 2013-08-19
CHEN, XINGLONG
Executed: 2013-08-19
VENKATARAMAN, SHANKAR
Executed: 2013-08-20
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Semiconductor Processing Systems Having Multiple Plasma Configurations