Assignment of Assignor's Interest

Recorded: 2013-09-07 Pages: 2

Assignor

ERSHOV, ALEXANDER I.

Executed: 2013-08-23

Assignee

CYMER LLC

17075 THORNMINT COURT, SAN DIEGO, CALIFORNIA, 92127

Covered Property (1)

Apparatus for and Method of Temperature Compensation in High Power Focusing System for Euv Lpp Source

Patent: 9,280,053 →

Application: 14/017,882 →

Publication: US 2015/0062544

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.