Patent Assignment
Reel/Frame 032911/0555
Assignment of Assignor's Interest
Recorded: 2014-05-16
Pages: 15
Assignor
CYMER, LLC
Executed: 2014-01-06
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Properties
(24)
Drive Laser Delivery Systems for Euv Light Source
Droplet Generator with Actuator Induced Nozzle Cleaning
Droplet Generator Steering System
Filter for Material Supply Apparatus
Laser Produced Plasma Euv Light Source
System and Method for Separating a Main Pulse and a Pre-Pulse Beam from a Laser Source
System and Method to Optimize Extreme Ultraviolet Light Generation
System and Method for Seed Laser Mode Stabilization
System and Method to Adaptively Pre-Compensate for Target Material Push-Out to Optimize Extreme Ultraviolet Light Production
Harsh Environment Optical Element Protection
Method of and Apparatus for in-Situ Repair of Reflective Optic
Application:
13/650,778 →
Publication:
US 2014/0102881
Target Material Supply Apparatus for an Extreme Ultraviolet Light Source
Viewport Protector for an Extreme Ultraviolet Light Source
System and Method for Protecting a Seed Laser in an Euv Light Source with a Bragg Aom
Thermal Monitor For An Extreme Ultraviolet Light Source
Target for Laser Produced Plasma Extreme Ultraviolet Light Source
System and Method for Return Beam Metrology with Optical Switch
Apparatus for and Method of Temperature Compensation in High Power Focusing System for Euv Lpp Source
Apparatus for Protecting Euv Optical Elements
Patent:
8,901,523 →
Application:
14/017,981 →
System and Method for Laser Beam Focus Control for Extreme Ultraviolet Laser Produced Plasma Source
Patent:
8,872,144 →
Application:
14/035,847 →
System and Method for Correcting the Focus of a Laser Beam
Drive Laser Delivery Systems for Euv Light Source
Method of and Apparatus for Supply and Recovery of Target Material
Method of and Apparatus for Supply and Recovery of Target Material
Application:
61/784,548 →
Related Assignments
(22)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 17, 2011
From: ERSHOV, ALEXANDER I.
To: CYMER, INC.
Reel/Frame 025974/0676 →
Assignment of Assignor's Interest
May 18, 2011
From: RAJYAGURU, CHIRAG; BAUMGART, PETER; VASCHENKO, GEORGIY O.
To: CYMER, INC.
Reel/Frame 026299/0677 →
Assignment of Assignor's Interest
Dec 20, 2011
From: BAUMGART, PETER M.; ALGOTS, J. MARTIN; GOVINDARAJU, ABHIRAM; RAJYAGURU, CHIRAG
To: CYMER, INC.
Reel/Frame 027417/0153 →
Assignment of Assignor's Interest
Jan 25, 2012
From: DE DEA, SILVIA; KALYNYCH, SERGEI; BAUMGART, PETER
To: CYMER, INC.
Reel/Frame 027594/0007 →
Assignment of Assignor's Interest
May 17, 2012
From: VASCHENKO, GEORGIY O.
To: CYMER, INC.
Reel/Frame 028229/0638 →
Assignment of Assignor's Interest
Jul 11, 2012
From: BERGSTEDT, ROBERT A.; PATE, CHRISTOPHER PAUL; ARCAND, JASON MICHAEL
To: CYMER, INC.
Reel/Frame 028532/0392 →
Assignment of Assignor's Interest
Sep 7, 2012
From: FRIHAUF, PAUL; RIGGS, DANIEL J.; GRAHAM, MATTHEW R.; CHANG, STEVEN
To: CYMER, INC.
Reel/Frame 028914/0578 →
Assignment of Assignor's Interest
Oct 16, 2012
From: DE DEA, SILVIA; BAUMGART, PETER; VASCHENKO, GEORGIY; BOWERING, NORBERT
To: CYMER, INC.
Reel/Frame 029136/0641 →
Assignment of Assignor's Interest
Oct 17, 2012
From: ERSHOV, ALEXANDER I.
To: CYMER, INC.
Reel/Frame 029141/0489 →
Assignment of Assignor's Interest
Nov 7, 2012
From: SENEKERIMYAN, VAHAN
To: CYMER, INC.
Reel/Frame 029259/0124 →
Assignment of Assignor's Interest
Nov 20, 2012
From: VAN DER BURGT, JEROEN; GRAHAM, MATTHEW R.; KINNEY, CHARLES; DUNSTAN, WAYNE J.
To: CYMER, INC.
Reel/Frame 029333/0347 →
Assignment of Assignor's Interest
Dec 13, 2012
From: SANDSTROM, RICHARD L.
To: CYMER, INC.
Reel/Frame 029464/0244 →
Assignment of Assignor's Interest
Jan 16, 2013
From: ERSHOV, ALEXANDER I.; BOWERING, NORBERT R.; LA FONTAINE, BRUNO M.; DE DEA, SILVIA
To: CYMER, INC.
Reel/Frame 029640/0348 →
Assignment of Assignor's Interest
Jan 22, 2013
From: FLEUROV, VLADIMIR; FOMENKOV, IGOR; SRIVASTAVA, SHALIENDRA
To: CYMER, INC.
Reel/Frame 029672/0959 →
Assignment of Assignor's Interest
Mar 25, 2013
From: SANDSTROM, RICHARD L.; GRAVA, JONATHAN D.
To: CYMER, INC.
Reel/Frame 030080/0413 →
Assignment of Assignor's Interest
May 2, 2013
From: RAFAC, ROBERT J.; TAO, YEZHENG
To: CYMER, INC.
Reel/Frame 030337/0394 →
Assignment of Assignor's Interest
Aug 6, 2013
From: GRAHAM, MATTHEW; BERGSTEDT, ROBERT; CHANG, STEVEN
To: CYMER, LLC
Reel/Frame 030949/0969 →
Merger
Mar 14, 2014
From: CYMER, INC.
To: CYMER, LLC
Reel/Frame 032445/0511 →
Merger
Mar 14, 2014
From: CYMER, INC.
To: CYMER, LLC
Reel/Frame 032445/0022 →
Assignment of Assignor's Interest
Sep 4, 2015
From: LAMBERT, MARTIN
To: TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBH
Reel/Frame 036495/0896 →
Change of Name
Jan 27, 2025
From: TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING AG
To: TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE
Reel/Frame 070014/0571 →
Change of Name
Jan 27, 2025
From: TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBH
To: TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING AG
Reel/Frame 070015/0125 →