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App. No. 13/650,778 · Confirmation No. 1040

METHOD OF AND APPARATUS FOR IN-SITU REPAIR OF REFLECTIVE OPTIC

Applicant: CYMER INC.
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2015-04-30 CLM Claims 5 View
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2015-04-30 WFEE Fee Worksheet (SB06) 1 View
2015-01-30 CTNF Non-Final Rejection 9 View
2015-01-30 892 List of references cited by examiner 1 View
2015-01-30 BIB Bibliographic Data Sheet 1 View
2015-01-30 SRNT Examiner's search strategy and results 2 View
2015-01-30 SRFW Search information including classification, databases and other search related notes 1 View
2015-01-30 1449 List of References cited by applicant and considered by examiner 2 View
2015-01-30 FWCLM Index of Claims 1 View
2014-12-16 ELC. Response to Election / Restriction Filed 1 View
2014-12-16 CLM Claims 4 View
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2014-03-18 TRAN.LET Transmittal Letter 3 View
2013-02-06 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
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2012-10-12 ADS Application Data Sheet 5 View
2012-10-12 SPEC Specification 8 View
2012-10-12 CLM Claims 4 View
2012-10-12 ABST Abstract 1 View
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Quick Facts
App. No.
13/650,778
Filed
2012-10-12
Pub. No.
US20140102881A1
Art Unit
1756