Patent Assignment
Reel/Frame 032445/0022
Merger
Recorded: 2014-03-14
Pages: 23
Assignor
CYMER, INC.
Executed: 2013-05-30
Assignee
CYMER, LLC
17075 THORNMINT COURT, INTELLECTUAL PROP DEPT MS/4-2D, SAN DIEGO, CALIFORNIA, 92127
Covered Properties
(25)
Beam Transport System for Extreme Ultraviolet Light Source
Euv Light Source Glint Reduction System
Method and Apparatus for Controlling Light Bandwidth
Alignment of Light Source Focus
Active Spectral Control of Optical Source
Systems and Methods for Cooling an Optic
Multi-Pass Optical Apparatus
Drive Laser Delivery Systems for Euv Light Source
Systems and Methods for Target Material Delivery Protection in a Laser Produced Plasma Euv Light Source
Master Oscillator-Power Amplifier Drive Laser with Pre-Pulse for Euv Light Source
Oscillator-Amplifier Drive Laser with Seed Protection for an Euv Light Source
System and Method for Compensating for Thermal Effects in an Euv Light Source
Systems and Methods for Optics Cleaning in an Euv Light Source
System and Method for Controlling Gas Concentration in a Two-Chamber Gas Discharge Laser System
Droplet Generator with Actuator Induced Nozzle Cleaning
Filter for Material Supply Apparatus of an Extreme Ultraviolet Light Source
Systems and Methods for Buffer Gas Flow Stabilization in a Laser Produced Plasma Light Source
Euv Light Source with Subsystem(S) for Maintaining Lpp Drive Laser Output During Euv Non-Output Periods
System and Method for High Accuracy Gas Refill in a Two Chamber Gas Discharge Laser System
System and Method for Automatic Gas Optimization in a Two-Chamber Gas Discharge Laser System
Energy Sensors for Light Beam Alignment
System and Method for High Accuracy Gas Inject in a Two Chamber Gas Discharge Laser System
Droplet Generator Steering System
Filter for Material Supply Apparatus
Intracavity Loss Element for Power Amplifier
Related Assignments
(19)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 8, 2010
From: BERGSTEDT, ROBERT A.; PARTLO, WILLIAM N.; FOMENKOV, IGOR V.; KIM, NAM-HYONG
To: CYMER, INC.
Reel/Frame 024044/0653 →
Assignment of Assignor's Interest
Apr 7, 2010
From: O'BRIEN, KEVIN M.; TRINTCHOUK, FEDOR B.
To: CYMER, INC.
Reel/Frame 024200/0789 →
Assignment of Assignor's Interest
Jun 18, 2010
From: GOVINDARAJU, ABHIRAM; PARTLO, WILLIAM N.
To: CYMER, INC.
Reel/Frame 024558/0977 →
Assignment of Assignor's Interest
Aug 5, 2010
From: GRAHAM, MATTHEW R.; PARTLO, WILLIAM N.; CHANG, STEVEN; BERGSTEDT, ROBERT A.
To: CYMER, INC.
Reel/Frame 024792/0941 →
Assignment of Assignor's Interest
Oct 8, 2010
From: ERSHOV, ALEXANDER I.; MORSE, ROBERT L.; PARTLO, WILLIAM N.; PATE, CHRISTOPHER P.
To: CYMER, INC.
Reel/Frame 025113/0602 →
Assignment of Assignor's Interest
Oct 29, 2010
From: SEONG, NAKGEUON; LALOVIC, IVAN B.; FARRAR, NIGEL R.; RAFAC, RPBERT J.
To: CYMER, INC.
Reel/Frame 025218/0050 →
Assignment of Assignor's Interest
Mar 9, 2011
From: SANDSTROM, RICHARD L.
To: CYMER, INC.
Reel/Frame 025927/0012 →
Assignment of Assignor's Interest
Mar 17, 2011
From: ERSHOV, ALEXANDER I.
To: CYMER, INC.
Reel/Frame 025974/0676 →
Assignment of Assignor's Interest
Mar 30, 2011
From: FOMENKOV, IGOR V.; PARTLO, WILLIAM N.
To: CYMER, INC.
Reel/Frame 026050/0291 →
Assignment of Assignor's Interest
Apr 1, 2011
From: HOU, KAI-CHUNG; SANDSTROM, RICHARD L.; PARTLO, WILLIAM N.; BROWN, DANIEL J.W.
To: CYMER, INC.
Reel/Frame 026061/0630 →
Assignment of Assignor's Interest
Apr 1, 2011
From: HOU, KAI-CHUNG; SANDSTROM, RICHARD L.; PARTLO, WILLIAM N.; BROWN, DANIEL J.W.
To: CYMER, INC.
Reel/Frame 026060/0539 →
Assignment of Assignor's Interest
Apr 15, 2011
From: BYKANOV, ALEXANDER N.; DE DEA, SILVIA; ERSHOV, ALEXANDER I.; FLEUROV, VLADIMIR B.
To: CYMER, INC.
Reel/Frame 026138/0089 →
Assignment of Assignor's Interest
Apr 29, 2011
From: RIGGS, DANIEL J.
To: CYMER, INC.
Reel/Frame 026204/0762 →
Assignment of Assignor's Interest
May 18, 2011
From: RAJYAGURU, CHIRAG; BAUMGART, PETER; VASCHENKO, GEORGIY O.
To: CYMER, INC.
Reel/Frame 026299/0677 →
Assignment of Assignor's Interest
May 20, 2011
From: FOMENKOV, IGOR V.; PARTLO, WILLIAM N.; VASCHENKO, GEORGIY O.; OLDHAM, WILLIAM
To: CYMER, INC.
Reel/Frame 026317/0549 →
Assignment of Assignor's Interest
Jun 9, 2011
From: FLEUROV, VLADIMIR B.; PARTLO, WILLIAM N.; FOMENKOV, IGOR V.; ERSHOV, ALEXANDER I.
To: CYMER, INC.
Reel/Frame 026416/0404 →
Assignment of Assignor's Interest
Jun 13, 2011
From: GRAHAM, MATTHEW R.; HAUGAN, OLAV; PARTLO, WILLIAM N.
To: CYMER, INC.
Reel/Frame 026435/0317 →
Assignment of Assignor's Interest
May 13, 2014
From: CYMER, LLC
To: ASML NETHERLANDS B.V.
Reel/Frame 032892/0177 →
Assignment of Assignor's Interest
May 16, 2014
From: CYMER, LLC
To: ASML NETHERLANDS B.V.
Reel/Frame 032911/0555 →