Assignment of Assignor's Interest

Recorded: 2011-06-13 Pages: 3

Assignors

GRAHAM, MATTHEW R.

Executed: 2011-04-26

HAUGAN, OLAV

Executed: 2011-04-26

PARTLO, WILLIAM N.

Executed: 2011-04-26

Assignee

CYMER, INC.

17075 THORNMINT COURT, SAN DIEGO, CALIFORNIA, 92127

Covered Property (1)

System and Method for Compensating for Thermal Effects in an Euv Light Source

Patent: 8,368,041 →

Application: 13/077,958 →

Publication: US 2012/0248341

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.