Patent Assignment
Reel/Frame 032892/0177
Assignment of Assignor's Interest
Recorded: 2014-05-13
Pages: 25
Assignor
CYMER, LLC
Executed: 2014-01-06
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Properties
(24)
Systems and Methods for Protecting an Euv Light Source Chamber from High Pressure Source Material Leaks
Metrology for Extreme Ultraviolet Light Source
Beam Transport System for Extreme Ultraviolet Light Source
Euv Light Producing System and Method Utilizing an Alignment Laser
System, Method and Apparatus for Droplet Catcher for Prevention of Backsplash in a Euv Generation Chamber
Laser Produced Plasma Euv Light Source
System, Method and Apparatus for Laser Produced Plasma Extreme Ultraviolet Chamber with Hot Walls and Cold Collector Mirror
System, Method and Apparatus for Aligning and Synchronizing Target Material for Optimum Extreme Ultraviolet Light Output
Euv Light Source Glint Reduction System
Alignment of Light Source Focus
Systems and Methods for Cooling an Optic
Multi-Pass Optical Apparatus
Systems and Methods for Target Material Delivery Protection in a Laser Produced Plasma Euv Light Source
Master Oscillator-Power Amplifier Drive Laser with Pre-Pulse for Euv Light Source
Oscillator-Amplifier Drive Laser with Seed Protection for an Euv Light Source
System and Method for Compensating for Thermal Effects in an Euv Light Source
Systems and Methods for Optics Cleaning in an Euv Light Source
Filter for Material Supply Apparatus of an Extreme Ultraviolet Light Source
Systems and Methods for Buffer Gas Flow Stabilization in a Laser Produced Plasma Light Source
Euv Light Source with Subsystem(S) for Maintaining Lpp Drive Laser Output During Euv Non-Output Periods
Energy Sensors for Light Beam Alignment
Light Collector Mirror Cleaning
System, Method and Apparatus for Laser Produced Plasma Extreme Ultraviolet Chamber with Hot Walls and Cold Collector Mirror
System, Method and Apparatus for Aligning and Synchronizing Target Material for Optimum Extreme Ultraviolet Light Output
Related Assignments
(22)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 21, 2009
From: VASCHENKO, GEORGIY O.; RAMADURAI, KRISHNA
To: CYMER, INC.
Reel/Frame 023132/0014 →
Assignment of Assignor's Interest
Mar 8, 2010
From: SENEKERIMYAN, VAHAN; KIM, NAM-HYONG; BERGSTEDT, ROBERT A.; FOMENKOV, IGOR V.
To: CYMER, INC.
Reel/Frame 024044/0371 →
Assignment of Assignor's Interest
Mar 8, 2010
From: BERGSTEDT, ROBERT A.; PARTLO, WILLIAM N.; FOMENKOV, IGOR V.; KIM, NAM-HYONG
To: CYMER, INC.
Reel/Frame 024044/0653 →
Assignment of Assignor's Interest
Mar 10, 2010
From: VASCHENKO, GEORGIY O.; ERSHOV, ALEXANDER I.; SANDSTROM, RICHARD L.
To: CYMER, INC.
Reel/Frame 024061/0158 →
Assignment of Assignor's Interest
Mar 31, 2010
From: ERSHOV, ALEXANDER I.; FOMENKOV, IGOR V.; HOFFMAN, JERZY R.; KIM, NAM-HYONG
To: CYMER, INC.
Reel/Frame 024166/0897 →
Employment, Confidential Information, Invention Assignment, and Arbitration Agreement
Mar 31, 2010
From: PAXTON, JASON
To: CYMER, INC.
Reel/Frame 024167/0011 →
Assignment of Assignor's Interest
Apr 5, 2010
From: PAXTON, JASON
To: CYMER, INC.
Reel/Frame 024187/0330 →
Assignment of Assignor's Interest
Apr 12, 2010
From: VASCHENKO, GEORGIY O.; PARTLO, WILLIAM N.; FOMENKOV, IGOR V.; SANDSTROM, RICHARD L.
To: CYMER, INC.
Reel/Frame 024221/0529 →
Assignment of Assignor's Interest
Apr 12, 2010
From: CHROBAK, CHRIS; PARTLO, WILLIAM N.; FOMENKOV, IGOR V.; ERSHOV, ALEXANDER I.
To: CYMER, INC.
Reel/Frame 024221/0466 →
Assignment of Assignor's Interest
Apr 12, 2010
From: PARTLO, WILLIAM N.; FOMENKOV, IGOR V.
To: CYMER, INC.
Reel/Frame 024221/0470 →
Assignment of Assignor's Interest
Jun 18, 2010
From: GOVINDARAJU, ABHIRAM; PARTLO, WILLIAM N.
To: CYMER, INC.
Reel/Frame 024558/0977 →
Assignment of Assignor's Interest
Aug 5, 2010
From: GRAHAM, MATTHEW R.; PARTLO, WILLIAM N.; CHANG, STEVEN; BERGSTEDT, ROBERT A.
To: CYMER, INC.
Reel/Frame 024792/0941 →
Assignment of Assignor's Interest
Oct 1, 2010
From: TADDIKEN, RICHARD C.
To: CYMER, INC.
Reel/Frame 025080/0622 →
Assignment of Assignor's Interest
Oct 8, 2010
From: ERSHOV, ALEXANDER I.; MORSE, ROBERT L.; PARTLO, WILLIAM N.; PATE, CHRISTOPHER P.
To: CYMER, INC.
Reel/Frame 025113/0602 →
Assignment of Assignor's Interest
Mar 9, 2011
From: SANDSTROM, RICHARD L.
To: CYMER, INC.
Reel/Frame 025927/0012 →
Assignment of Assignor's Interest
Mar 30, 2011
From: FOMENKOV, IGOR V.; PARTLO, WILLIAM N.
To: CYMER, INC.
Reel/Frame 026050/0291 →
Assignment of Assignor's Interest
Apr 1, 2011
From: HOU, KAI-CHUNG; SANDSTROM, RICHARD L.; PARTLO, WILLIAM N.; BROWN, DANIEL J.W.
To: CYMER, INC.
Reel/Frame 026061/0630 →
Assignment of Assignor's Interest
Apr 1, 2011
From: HOU, KAI-CHUNG; SANDSTROM, RICHARD L.; PARTLO, WILLIAM N.; BROWN, DANIEL J.W.
To: CYMER, INC.
Reel/Frame 026060/0539 →
Assignment of Assignor's Interest
Apr 15, 2011
From: BYKANOV, ALEXANDER N.; DE DEA, SILVIA; ERSHOV, ALEXANDER I.; FLEUROV, VLADIMIR B.
To: CYMER, INC.
Reel/Frame 026138/0089 →
Assignment of Assignor's Interest
Jun 13, 2011
From: GRAHAM, MATTHEW R.; HAUGAN, OLAV; PARTLO, WILLIAM N.
To: CYMER, INC.
Reel/Frame 026435/0317 →
Merger
Mar 13, 2014
From: CYMER, INC.
To: CYMER, LLC
Reel/Frame 032427/0529 →
Merger
Mar 14, 2014
From: CYMER, INC.
To: CYMER, LLC
Reel/Frame 032445/0022 →