IP Library Granted Patent US 9,066,412
Granted Patent B2
US 9,066,412 · App. 12/900,762 · Granted Jun 23, 2015

Systems and methods for cooling an optic

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Quick Facts
Patent No.
US 9,066,412
App. No.
12/900,762
Granted
Jun 23, 2015
Kind
B2
Abstract

Devices are described herein which may comprise an optic having a non-planar surface, the non-planar surface having an optically active portion; and a flow guide directing gas upon the non-planar surface to produce turbulent flow on at least a portion of the optically active portion of the non-planar surface to cool the optic.

Claims (30)

1. A device comprising:

an optic having a non-planar surface and an annular periphery, the nonplanar surface having an optically active portion, the optic representing a lens for focusing light passing through the nonplanar surface toward a focal spot; and

a flow guide disposed concentrically surrounding and outside of said periphery, said flow guide having a plurality of nozzles disposed on an inward facing surface of said flow guide, said plurality of nozzles directing gas upon said non-planar surface to produce turbulent flow on at least a portion of the optically active portion of said non-planar surface to cool said optic.

2. A device as recited in claim 1 wherein turbulent flow is produced on at least seventy-five percent of said optically active portion of said non-planar surface.

3. A device as recited in claim 1 wherein each nozzle is a diverging nozzle.

4. A device as recited in claim 1 wherein said flow guide has at least six uniformly spaced nozzles.

5. A device as recited in claim 1 wherein the nozzles are positioned and arranged to flow gas along a spiral path from a peripheral region of said optically active portion to a central region of said optically active portion.

6. A device as recited in claim 1 wherein said flow guide is made of a thermally conductive material and wherein a thermally conductive spacer is positioned between said optic and ring to conduct heat from said optic to said ring.

7. A device as recited in claim 1 wherein said ring is formed with a single gas flow inlet and an internal passageway connecting said inlet to each nozzle.

8. A device as recited in claim 1 wherein said optically active surface portion is convex.

9. A device as recited in claim 1 wherein a first nozzle produces an output jet oriented to disturb an output jet from a second nozzle.

10. A device as recited in claim 1 wherein a first nozzle produces an output jet oriented to disturb an output jet from a second nozzle at a peripheral region of said optically active portion.

11. A device comprising:

an optic having an annular periphery and a convex surface;

a laser irradiating said optic by passing through the convex surface of the optic and focusing upon a focal spot of said optic; and

a flow guide disposed concentrically surrounding and outside of said periphery, said flow guide having a plurality of nozzles disposed on an inward facing surface of said flow guide, said plurality of nozzles directing gas on said convex surface of said optic during irradiation of the optic to produce turbulent flow on at least a portion of the optic.

12. A device as recited in claim 11 wherein said flow guide comprises a ring.

13. A device as recited in claim 11 wherein each nozzle is a diverging nozzle.

14. A device as recited in claim 11 wherein said flow guide has at least six uniformly spaced nozzles.

15. A device as recited in claim 11 wherein the nozzles are positioned and arranged to flow gas along a spiral path from a peripheral region of an optically active portion of the optic to a central region of said optically active portion.

16. A device as recited in claim 11 wherein a first nozzle produces an output jet oriented to disturb an output jet from a second nozzle at a peripheral region of an optically active portion of the optic.

17. A method comprising the steps of:

providing an optic having an annular periphery and a convex surface;

disposing a flow guide concentrically surrounding and outside of said periphery, said flow guide having a plurality of nozzles disposed on an inward facing surface of said flow guide;

irradiating said optic with a laser beam by passing through the convex surface of the optic and focusing upon a focal spot of said optic; and

directing gas from said plurality of nozzles on said convex surface of said optic during said irradiating step to produce turbulent flow on at least a portion of the optic.

18. A method as recited in claim 17 wherein the optic is a lens.

19. A method as recited in claim 17 further comprising the steps of:

producing a first output jet at a peripheral region of an optically active portion of the optic; and

producing a second output jet oriented to disturb the first output jet.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 13, 2014
From: CYMER, LLC
To: ASML NETHERLANDS B.V.
Reel/Frame 032892/0177 →
MERGER Recorded Mar 14, 2014
From: CYMER, INC.
To: CYMER, LLC
Reel/Frame 032445/0022 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 8, 2010
From: ERSHOV, ALEXANDER I.; MORSE, ROBERT L.; PARTLO, WILLIAM N.; PATE, CHRISTOPHER P.
To: CYMER, INC.
Reel/Frame 025113/0602 →