Patent Assignment
Reel/Frame 026050/0291
Assignment of Assignor's Interest
Recorded: 2011-03-30
Pages: 2
Assignee
CYMER, INC.
17075 THORNMINT COURT, LEGAL DEPT. M/S 4-2D, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
Systems and Methods for Target Material Delivery Protection in a Laser Produced Plasma Euv Light Source
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.