Patent Assignment
Reel/Frame 032427/0529
Merger
Recorded: 2014-03-13
Pages: 23
Assignor
CYMER, INC.
Executed: 2013-05-30
Assignee
CYMER, LLC
17075 THORNMINT COURT, INTELLECTUAL PROP DEPT MS/4-2D, SAN DIEGO, CALIFORNIA, 92127
Covered Properties
(23)
Spectral Purity Filters and Methods Therefor
Systems and Methods for Heating an Euv Collector Mirror
Method and Apparatus for Laser Control in a Two Chamber Gas Discharge Laser
Method and Apparatus for Laser Control in a Two Chamber Gas Discharge Laser
Method and Apparatus for Laser Control in a Two Chamber Gas Discharge Laser
Metal Fluoride Trap
High Power Seed/Amplifier Laser System with Beam Shaping Intermediate the Seed and Amplifier
Systems and Methods for Collector Mirror Temperature Control Using Direct Contact Heat Transfer
Patent:
7,641,349 →
Application:
12/284,585 →
Systems and Methods for Protecting an Euv Light Source Chamber from High Pressure Source Material Leaks
Systems and Methods for Drive Laser Beam Delivery in an Euv Light Source
Gas Discharge Laser Chamber
System Method and Apparatus for Selecting and Controlling Light Source Bandwidth
Advanced Laser Wavelength Control
Metrology for Extreme Ultraviolet Light Source
Euv Light Producing System and Method Utilizing an Alignment Laser
System, Method and Apparatus for Droplet Catcher for Prevention of Backsplash in a Euv Generation Chamber
Laser Produced Plasma Euv Light Source
Regenerative Ring Resonator
System, Method and Apparatus for Laser Produced Plasma Extreme Ultraviolet Chamber with Hot Walls and Cold Collector Mirror
System, Method and Apparatus for Aligning and Synchronizing Target Material for Optimum Extreme Ultraviolet Light Output
Method and System for Managing Light Source Operation
Light Collector Mirror Cleaning
System Method and Apparatus for Selecting and Controlling Light Source Bandwidth
Patent:
45,249 →
Application:
13/778,006 →
Related Assignments
(22)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 19, 2008
From: CHAVEZ, JUAN ARMANDO; BOWERING, NORBERT R.
To: CYMER, INC.
Reel/Frame 021407/0414 →
Assignment of Assignor's Interest
Sep 15, 2008
From: BYKANOV, ALEXANDER N; FOMENKOV, IGOR V.
To: CYMER, INC.
Reel/Frame 021530/0559 →
Assignment of Assignor's Interest
Nov 7, 2008
From: CHROBAK, CHRISTOPHER P.; FOMENKOV, IGOR V.
To: CYMER, INC.
Reel/Frame 021803/0356 →
Assignment of Assignor's Interest
Nov 26, 2008
From: JACQUES, ROBERT N.
To: CYMER, INC.
Reel/Frame 021894/0848 →
Assignment of Assignor's Interest
Nov 26, 2008
From: JACQUES, ROBERT N.
To: CYMER, INC.
Reel/Frame 021895/0076 →
Assignment of Assignor's Interest
Dec 1, 2008
From: MORTON, RICHARD; AMADA, YOSHIHO
To: CYMER, INC.
Reel/Frame 021917/0375 →
Assignment of Assignor's Interest
Dec 3, 2008
From: JACQUES, ROBERT N.
To: CYMER, INC.
Reel/Frame 021922/0526 →
Assignment of Assignor's Interest
Jan 7, 2009
From: SANDSTROM, RICHARD L.; BROWN, DANIEL J.W.; HOFMANN, THOMAS; ROBINSON, JASON D.
To: CYMER, INC.
Reel/Frame 022068/0226 →
Assignment of Assignor's Interest
Aug 21, 2009
From: VASCHENKO, GEORGIY O.; RAMADURAI, KRISHNA
To: CYMER, INC.
Reel/Frame 023132/0014 →
Assignment of Assignor's Interest
Nov 18, 2009
From: RIGGS, DANIEL J.; HAUGAN, OLAV
To: CYMER, INC.
Reel/Frame 023536/0539 →
Assignment of Assignor's Interest
Jan 7, 2010
From: PARTLO, WILLIAM N.; FOMENKOV, IGOR V.; PAXTON, JASON
To: CYMER, INC.
Reel/Frame 023748/0573 →
Assignment of Assignor's Interest
Mar 8, 2010
From: SENEKERIMYAN, VAHAN; KIM, NAM-HYONG; BERGSTEDT, ROBERT A.; FOMENKOV, IGOR V.
To: CYMER, INC.
Reel/Frame 024044/0371 →
Assignment of Assignor's Interest
Mar 10, 2010
From: VASCHENKO, GEORGIY O.; ERSHOV, ALEXANDER I.; SANDSTROM, RICHARD L.
To: CYMER, INC.
Reel/Frame 024061/0158 →
Assignment of Assignor's Interest
Mar 23, 2010
From: FIGUEROA, EFRAIN; PARTLO, WILLIAM N.; ALGOTS, JOHN MARTIN
To: CYMER, INC.
Reel/Frame 024133/0199 →
Employment, Confidential Information, Invention Assignment, and Arbitration Agreement
Mar 31, 2010
From: PAXTON, JASON
To: CYMER, INC.
Reel/Frame 024167/0011 →
Assignment of Assignor's Interest
Mar 31, 2010
From: ERSHOV, ALEXANDER I.; FOMENKOV, IGOR V.; HOFFMAN, JERZY R.; KIM, NAM-HYONG
To: CYMER, INC.
Reel/Frame 024166/0897 →
Assignment of Assignor's Interest
Apr 5, 2010
From: PAXTON, JASON
To: CYMER, INC.
Reel/Frame 024187/0330 →
Assignment of Assignor's Interest
Apr 12, 2010
From: VASCHENKO, GEORGIY O.; PARTLO, WILLIAM N.; FOMENKOV, IGOR V.; SANDSTROM, RICHARD L.
To: CYMER, INC.
Reel/Frame 024221/0529 →
Assignment of Assignor's Interest
Oct 1, 2010
From: TADDIKEN, RICHARD C.
To: CYMER, INC.
Reel/Frame 025080/0622 →
Assignment of Assignor's Interest
Apr 4, 2011
From: SANDSTROM, RICHARD L.; PARTLO, WILLIAM N.; BROWN, DANIEL J.W.; MOOSMAN, BRYAN G
To: CYMER, INC.
Reel/Frame 026071/0902 →
Assignment of Assignor's Interest
May 9, 2014
From: CYMER, LLC
To: ASML NETHERLANDS B.V.
Reel/Frame 032860/0748 →
Assignment of Assignor's Interest
May 13, 2014
From: CYMER, LLC
To: ASML NETHERLANDS B.V.
Reel/Frame 032892/0177 →